Fluoropolymer (Perfluoroelastomer) Sealing Material (DUPRA)
What is DUPRA?
DUPRA is a perfluoroelastomer (FFKM) product with rubber elasticity provided by DAIKIN FINETECH of Daikin Group.
Similar to polytetrafluoroethylene (PTFE), Perfluoroelastomer features with diverse excellent performances such as thermal resistance, chemical resistance, non-adhesiveness, and weather resistance.
The polymer backbone of Perfluoroelastomer is composed of carbon and fluorine (C-F), which is higher and more stable binding energy than that of carbon and hydrogen (C-H) which are the backbone of common organic compounds, and thus Perfluoroelastomer demonstrates a high resistance performance to all external energies.
* An elastomer refers to a polymeric material capable of being deformed upon application of a weak force and quickly returning to its original size and shape upon release of the applied force, allowed by crosslinking the constituent high molecular polymers.
DUPRA Product Lineup
| Recommended Processes | Thermal Process Oxidation/Diffusion |
Plasma Process CVD/Etching/Ashing |
Cleaning Process Wet |
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|---|---|---|---|---|---|---|---|---|
| Product Lineup | DU351 | DU353 (E) | DU551 | DU3R1 (E) | DU341 | DU354 | ||
| Features | Standard | Thermal Resistance | Super Thermal Resistance | Plasma Resistance | Fluorine Radical Resistance | Chemical Resistance | ||
| Appearance |  |
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| Color | Black | Black | Black | Red | Brown | Black | ||
| Thermal Resistant Temperature for Continuous Use (Reference) | [℃] | 290 | 295 | 300 | 295 | 295 | 290 | |
| Thermal Resistant Temperature (Reference) | [℃] | 310 | 310 | 330 | 305 | 305 | 300 | |
| Hardness(1)《ShoreA》 | － | 74 | 77 | 75 | 74 | 72 | 75 | |
| Tensile Strength(2) | [MPa] | 19.0 | 18.6 | 17.5 | 15.0 | 14.0 | 16.1 | |
| Elongation at Break(2) | [％] | 200.0 | 205.0 | 170.0 | 260.0 | 250.0 | 205.0 | |
| 100% Modulus(2) | [MPa] | 5.2 | 6.0 | 7.4 | 5.2 | 2.6 | 6.0 | |
| Permanent Compression Set(3) | After 70 Hours at 250°C | [％] | 10 | 8 | 8 | 12 | 10 | 32 |
| After 70 Hours at 300°C | [％] | 30 | 24 | 18 | 33 | 30 | － | |
| Option: Low Adherence Grade | － | 〇 | 〇 | － | － | － | ||
Features of DUPRA by Article No.
| Article No. | Features |
|---|---|
| DU351 | Thermal resistance and chemical resistance superior to fluoroelastomers (FKM). Standard DUPRA article with very low metal content. |
| DU353 (E) | Standard article for thermal process. This performs superior thermal resistance and gas resistance among FFKM articles. |
| DU551 | Article with super thermal resistance. Higher thermal resistance with the performance of DU353 (E) maintained. One of the highest thermal resistance performance among FFKMs. |
| DU3R1 (E) | Standard article for plasma process. Low weight change and low dusting with oxygen and fluorine plasmas |
| DU341 | The highest performance in plasma process, with high resistance to fluorine radicals |
| DU354 | Article for cleaning process. Excellent resistance to chemicals such as strong acids and strong alkalis, and extremely low metal elution. |
Selection Chart of DUPRA by Application
| Process | Sealing Material Application Environment | Recommended Article No. | |||
|---|---|---|---|---|---|
| Temperature | Gas type | ||||
| Thermal Process |  |
LPCVD Oxidation Diffusion Lamp Anneal ALD |
25～ 300℃ |
O2, H2O, H2O2, O3,NH3, SiH4, N2, HCI,NF3, CIF3, F2, HF, etc |
DU551 DU353 (E) DU351 |
| Plasma Process |  | HDPCVD PECVD MetalCVD Etching Ashing |
25～ 250℃ |
CF4, O2, HBr, Cl2,NH3, SiH4, H2O, Vaper, TEOS, NF3,CIF3, F2, HF, etc |
DU341 DU3R1 (E) DU353 (E) ／ DU551 |
| Cleaning Process |  |
Cleaning Etching Stripping |
25～ 180℃ |
SC-1, SC-2, O3, HF,H2SO4, H2OVaper,IPA, H2O2, NH3,Hydroxilamine etc | DU354 |
Application Examples
- Components for Semiconductor Manufacturing Equipment
- Semiconductor Valve Seats